Electrical inspection fixture, probe unit and electrical inspection device

Abstract

One aspect of the present invention aims to provide an electrical inspection fixture capable of pressing probes against each measurement point of an inspection substrate under appropriate load. One aspect of the electrical inspection fixture 1 of the present invention includes one or more probe units 10. Each probe unit 10 has a probe holder 11 and one or more probes 12 disposed on the probe holder 11. The probe unit 10 further includes a moving mechanism 13 for advancing and retracting the probe holder 11 relative to the inspection substrate 200. Each probe 12 has an elastic deformation portion 14 that elastically deforms upon contact with the inspection substrate 200.

Images