Silicon-organic hybrid modulator including insulating layer

TW202638095APending Publication Date: 2026-09-16NLM PHOTONICS
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Patent Information

Application Number
TW115102627
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-22
Filing Date
2026-01-22
Publication Date
2026-09-16

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Abstract

A modulator includes a waveguide covered with an organic electro-optic (OEO) material, transmission lines coupled between the slot waveguide and drive electrodes, and an insulating layer disposed between the transmission lines and the OEO material. A method of manufacturing a silicon-organic hybrid modulator includes forming an initial insulating layer over the transmission lines and the slot waveguide of the modulator, etching the initial insulating layer to form an insulating layer that covers the transmission lines, and forming the OEO material over the insulating layer.
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