Optical system, projection exposure apparatus and method

Abstract

This embodiment provides an optical system (100) for a projection exposure device (1), comprising an optical element (106) and a mounting base (114) supporting the optical element (106). The mounting base (114) has a plurality of spring-loaded deformable support legs (118A, 118B, 120), each of the support legs (118A, 118B, 120) having a support portion (124) and a bridging portion (130). The optical element (106) is connected to the mounting base (114) only at the support portions (124). 8B, 120) have different support leg widths (140, 142) at the support portions (124) and at the bridging portions (130), wherein the support leg width (140, 142) changes abruptly from the support portions (124) to the bridging portions (130), wherein each of the support legs (118A, 118B, 120) in the plan view of the support legs (118A, 118B, 120) has an outer contour (148, 152), and wherein the corresponding outer contour (148, 152) considered along one of the radial directions (104) of the optical system (100) deviates from a straight line. An optical system (100) for a projection exposure apparatus (1), comprising an optical element (106), and a mount (114), which bears the optical element (106), wherein the mount (114) has a multiplicity of spring-elastically deformable sup-port feet (118A, 118B, 120), wherein the support feet (118A, 118B, 120) each have a support portion (124) and a bridge portion (130), wherein the optical element (106) is connected to the mount (114) only at the support portions (124), wherein the support feet (118A, 118B, 120) have a different support foot width (140, 142) at the support portions (124) and at the bridge portions (130), wherein the support foot width (140, 142) changes abruptly from the support portions (124) to the bridge portions (130), wherein the support feet (118A, 118B, 120) in a plan view of the support feet (118A, 118B, 120) each have an outer contour (148, 152), and wherein the respective outer contour (148, 152),considered along a radial direction (104) of the optical system (100), deviates from a straight line.,

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