Reflection-based phase contrast microscope system

Abstract

A reflective phase contrast microscope system, and a corresponding inspection system are described. The phase contrast microscope comprises an illumination channel, a collection channel, a space variant beam splitting unit and an objective lens arrangement. The space variant beam splitting unit comprises a pattern of transmitting regions and at least one partly reflecting region. Wherein the partly reflecting regions have a form that, when reflecting light toward the objective lens or coming from the objective lens, the reflected light pattern forms a ring illumination pattern.

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