Radiation generator, inspection device, and radiation generation method

Abstract

A radiation generator, an inspection device, and a radiation generation method are disclosed to improve resolution, material contrast, throughput, and contamination. The radiation generator includes a radiation source configured to provide input radiation, at least one solid medium optically coupled to the radiation source, and a non-solid medium optically coupled to the at least one solid medium. The at least one solid medium is configured to convert the input radiation at least into first radiation via at least one first nonlinear process. A first frequency of the first radiation is higher than an input frequency of the input radiation. The non-solid medium is configured to convert the first radiation at least into second radiation via a second nonlinear process.

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