Wavelength selection system
TW202638168APending Publication Date: 2026-09-16ASML NETHERLANDS BV
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Patent Information
- Application Number
- TW114140810
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-05-26
- Filing Date
- 2025-10-22
- Publication Date
- 2026-09-16
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Figure TWG2TA001076345_001 
Figure TWG2TA001076345_002 
Figure TWG2TA001076345_003
Abstract
A wavelength selection system comprising an actuatable reflector configured to reflect a radiation beam, and an optical filter configured to receive the reflected radiation beam, wherein the actuatable reflector is moveable between different orientations which direct the radiation beam to different positions on the optical filter, or at different angles of incidence on the optical filter, such that the optical filter selectively filters different wavelengths of the radiation beam, and wherein the wavelength selection system further comprises a dispersive element configured to apply wavelength dispersion to the radiation beam before the radiation beam is incident upon the optical filter.
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