Illumination unit, exposure device, and exposure method

Abstract

An illumination unit includes: a light source; a first optical system that forms a first intermediate image of the light source by means of light emitted from the light source; an optical integrator that includes a plurality of lens elements and forms a second intermediate image conjugate to the first intermediate image at each exit surface of the plurality of lens elements; and a shutter disposed at or near the position of the first intermediate image and having a light-reducing section for reducing the light emitted from the light source; the exit surfaces of the plurality of lens elements, when viewed from the optical axis direction of the first optical system, have a first intermediate image formed by means of light emitted from the light source. The light-reducing section has a rectangular shape with the long side direction as the long side direction and the short side direction as the second direction orthogonal to the first direction; the light-reducing section has: a first part that allows light emitted from the light source to pass through at two or more positions spaced at a predetermined distance in the direction corresponding to the first direction; and a second part that blocks the light emitted from the light source; the first part has: two or more apertures that allow light emitted from the light source to pass through in such a way that a portion of the second intermediate image is imaged at two or more positions spaced at a distance in the first direction in each of the emission surfaces of a plurality of lens elements. none

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