Optics damage metrology in excimer light sources

Abstract

A system includes: an excimer laser configured to generate light having a first wavelength, the excimer laser including at least one optical element interacting with the generated light; a sensor device configured to detect light emanating from the optical element, the detected light having one or more wavelengths that are distinct from the first wavelength; and an assessment module in communication with the sensor device. The assessment module is configured to: analyze the detected light; and generate an estimate of damage to the optical element based on the analysis.

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