Substrate processing system
TW202638185APending Publication Date: 2026-09-16EBARA CORP
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Patent Information
- Application Number
- TW114148802
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-16
- Filing Date
- 2025-12-12
- Publication Date
- 2026-09-16
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Abstract
A substrate processing system is provided that can reliably set parameters without causing setting errors. The substrate processing system includes a communication network for connecting a plurality of control devices and transmitting and receiving parameters related to the operating conditions of the equipment among the plurality of control devices.
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