A charged particle beam device and method

TW202638470APending Publication Date: 2026-09-16ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK GMBH
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Patent Information

Application Number
TW114137816
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-12
Filing Date
2025-10-01
Publication Date
2026-09-16

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Abstract

The present disclosure relates to a charged particle beam device having an optical axis, comprising: a charged particle source for providing a primary charged particle beam; a deflector arrangement configured to provide a tilted primary charged particle beam and to guide signal charged particles comprising: a first deflector, a second deflector positioned downstream of the first deflector, a third deflector positioned downstream of the second deflector, a fourth deflector positioned downstream of the third deflector; a first detector comprising a first detection area for detecting signal charged particles and positioned upstream of the second deflector; an objective lens for focusing the primary charged particle beam onto a sample to generate the signal charged particles.
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