Method of inspecting and / or processing a sample and system thereof
TW202638475APending Publication Date: 2026-09-16CARL ZEISS SMT GMBH
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Patent Information
- Application Number
- TW114143341
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-11-28
- Filing Date
- 2025-11-06
- Publication Date
- 2026-09-16
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Abstract
The present disclosure refers to a method of inspecting and / or processing a sample and a corresponding system. The method comprises generating an electrically conducting loop around a site of interest of a sample, and inspecting and / or processing the site of interest with at least one charged particle beam.
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