Arrangement comprising at least two optical elements and a plasma generating device

TW202638682APending Publication Date: 2026-09-16CARL ZEISS SMT GMBH
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Patent Information

Application Number
TW115101099
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-12
Filing Date
2026-01-12
Publication Date
2026-09-16

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Abstract

within the cavity. The invention allows plasma cleaning within the cavity without the optical elements having to be demounted.
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