Electronic component transfer apparatus, semiconductor manufacturing apparatus and fixture
TW202638724APending Publication Date: 2026-09-16KIOXIA CORP
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Patent Information
- Application Number
- TW114128820
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-03-12
- Filing Date
- 2025-07-30
- Publication Date
- 2026-09-16
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Abstract
According to one embodiment, an electronic component transfer device includes a chuck and a retainer. The chuck has: an adsorption surface, which, when viewed from above, has a rectangular shape including a first side extending along a first direction and a second side extending along a second direction intersecting the first direction, and adsorbs and holds electronic components; a first side surface intersecting the adsorption surface along the first direction; and a second side surface intersecting the adsorption surface along the second direction. The retainer has: a first sidewall contacting the first side surface and having a first height, and a second sidewall contacting the second side surface and having a second height lower than the first height, and holds the chuck.
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