Error detection method for substrate processing and related apparatuses

Abstract

Embodiments of the present disclosure generally relate to methods of detecting errors during a substrate processing operation, and related apparatuses and components. In one or more embodiments, a non-transitory computer readable medium stores instructions that when executed by one or more processors of a system, cause the system to determine a presence of one or more errors of one or more components disposed within an internal volume of a processing chamber based on a video signal. The one or more errors include a displaced substrate, a dripping nozzle mechanism, a fluid present on a rotor cover, or a fluid present on a substrate.

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