Non-contact pad cleaning apparatus

Abstract

A non-contact pad cleaning device is provided that makes it difficult for liquid supplied to the grinding surface of a grinding pad to remain on the grinding surface, thereby improving the cleaning effect of the grinding surface. The grinding surface cleaning device (8) includes: a plurality of dual-fluid nozzles (9) that spray a dual-fluid jet; and an upstream nozzle cover (41) and a downstream nozzle cover (42). The upstream nozzle cover (41) is disposed upstream of the plurality of dual-fluid nozzles (9) in the rotational direction of the grinding pad (2), and the downstream nozzle cover (42) is disposed downstream of the plurality of dual-fluid nozzles (9) in the rotational direction of the grinding pad (2). The distance (D1) from the grinding surface (2a) to the lower end (41c) of the upstream nozzle cover (41) is greater than the distance (D2) from the grinding surface (2a) to the lower end (42c) of the downstream nozzle cover (42).

Images