Surface treatment method and surface treatment apparatus

Abstract

This invention discloses a method for preventing liquid splashing of cleaning solutions and other treatment liquids, thereby improving the accuracy of surface treatments such as cleaning. The surface treatment method disclosed herein involves rotating a workpiece having a first treatment surface of a first height and a second treatment surface of a height lower than the first height, while simultaneously spraying a treatment liquid from a nozzle onto the first and second treatment surfaces. The treatment liquid is sprayed from the nozzle at an angle above and obliquely above the first and second treatment surfaces, in the direction of rotation of the workpiece.

Images