Multi-compartment gas panel assembly

Abstract

Disclosed herein is a gas panel assembly operable with a substrate processing chamber, the gas panel assembly including an enclosure defining a first compartment and a second compartment separated by a divider wall. A first gas pallet assembly within the first compartment is operable to provide a first gas to the substrate processing chamber, and a second gas pallet assembly within the second compartment is operable to provide a second gas to the substrate processing chamber. The gas panel assembly may further include a first flow control device between the first compartment and an exhaust, the first flow control device operable to control air flow between the first compartment and the exhaust, and a duct connecting the second compartment and the exhaust, wherein a second flow control device is operable to control air flow between the second compartment and the duct.

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