Location export method and location export system

Abstract

An exemplary embodiment of the position derivation method of the present invention includes the following steps: with the measuring device placed on an electrostatic chuck and surrounded by a ring member, measuring a first electrostatic capacitance using a plurality of first sensors. The method includes the following steps: determining whether the measuring device is positioned at the center of the ring member based on the first electrostatic capacitance. The method includes the following steps: with the measuring device positioned at the center of the ring member, deriving the position of the measuring device relative to the center of the electrostatic chuck as a reference position based on a second electrostatic capacitance measured by a plurality of second sensors.

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