Method, system and apparatus for teaching and verifying end station

Abstract

The disclosure generally relates to a robotic system for positioning a workpiece relative to certain machinery. In one embodiment, the disclosure relates to a method, system and apparatus to teach positioning robots to place a workpiece relative to a processing center such as a chuck and to verify the placement using geometrical relationship therebetween. In one embodiment, the disclosure relates to an apparatus to position a workpiece at a chuck of a processing station. The apparatus includes a memory circuitry comprising an executable code; a central processing unit (CPU) in communication with the memory circuitry; an end effector (EE) for grasping and relocating the workpiece as well as an alignment chuck and a processing chuck. The alignment chuck and the wafer may be used to determine the distance between the chuck’s center location (E) and the workpiece’s center using various geometric relationships.

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