Chuck pin, substrate holding device, and substrate processing device

TW202638916APending Publication Date: 2026-09-16SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
TW114147616
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-12
Filing Date
2025-12-05
Publication Date
2026-09-16

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    Figure TWG2TA001076629_002
  • Figure TWG2TA001076629_003
    Figure TWG2TA001076629_003
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Abstract

The present invention achieves a chuck pin that prevents processing liquid from remaining on the substrate. The fixed chuck pin (30B) includes: a main body (31) having a main surface (31a) on the upper part; a lower surface support (32) provided in a manner that protrudes upward from the main surface to support the lower surface of the substrate; and a side gripping part (33) protruding upward from the main surface and disposed off the ground from the lower surface support part to grip the side of the substrate.
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