Nozzle position detection method, computer program, and substrate processing apparatus

Abstract

The purpose of this invention is to provide a technique for high-precision nozzle position inspection even using only one camera. The nozzle position inspection method of this invention includes the following steps: a) holding a second substrate W2 having a reflective surface Ws2 by a substrate holding part 20; b) taking pictures of a nozzle 412 positioned at a first position above the second substrate W2 and the mirror image of the nozzle 412 reflected by the reflective surface Ws2 of the second substrate W2 with a camera 71, obtaining a first image Fv1 including the nozzle 412 and the mirror image of the nozzle; and calculating the in-plane position of the nozzle 412 on the reflective surface Ws2 in the first image Fv1 based on the positional relationship between the nozzle 412 and the mirror image of the nozzle 412 in the obtained first image Fv1.

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