Automated showerhead tilt adjustment

TW202638930APending Publication Date: 2026-09-16LAM RES CORP
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Patent Information

Application Number
TW115106834
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2020-06-23
Filing Date
2021-06-22
Publication Date
2026-09-16

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Abstract

In some examples, an automated tilting system is provided for adjusting an orientation of a component in a substrate processing chamber. The automated tilting system comprises at least one tilt adjustment motor arranged to cooperate with the component and be connected to a portion of the component by a coupling. The coupling is configured such that automated rotational motion by the at least one tilt adjustment motor imparts corresponding axial movement, relative to the at least one tilt adjustment motor or a datum structure, to the connected portion of the component to adjust the orientation of the component in the processing chamber.
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