Method of forming semiconductor transistor structure, semiconductor device, and method of forming integrated circuit
TW202638938APending Publication Date: 2026-09-16TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
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Patent Information
- Application Number
- TW114118715
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-03-13
- Filing Date
- 2025-05-19
- Publication Date
- 2026-09-16
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Abstract
A semiconductor transistor mesa isolation structure and method of forming the same including a mesa isolation structure located between a first gate and a second gate, the mesa isolation structure including sidewalls latitudinally offset from each of the first gate and the second gate, and the mesa isolation structure extending through an interior of a barrier layer of the semiconductor transistor, and the mesa isolation structure formed with a dielectric material.
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