Semiconductor memory device and method for manufacturing semiconductor memory device

TW202638945APending Publication Date: 2026-09-16KIOXIA CORP
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
TW114128655
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-14
Filing Date
2025-07-29
Publication Date
2026-09-16

Smart Images

  • Figure TWG2TA001076215_001
    Figure TWG2TA001076215_001
  • Figure TWG2TA001076215_002
    Figure TWG2TA001076215_002
  • Figure TWG2TA001076215_003
    Figure TWG2TA001076215_003
Patent Text Reader

Abstract

One embodiment of a semiconductor memory device includes a stacked body, an interlayer insulating film, a plate-like portion, and a pillar portion. The stacked body has multiple conductive layers and multiple insulating layers. The stacked body has an upper portion and a lower portion. The multiple conductive layers include stepped portions. The stepped portions are processed into a stepped shape. The interlayer insulating film covers the stepped portions. The plate-like portion extends along a first direction and penetrates the stacked body along the stacking direction. The plate-like portion is formed intermittently along the first direction with intervals between it and the interrupted portions. The pillar portion is formed at the interrupted portions. The pillar portion penetrates the stacked body along the stacking direction and extends from the lower portion to the upper portion.
Need to check novelty before this filing date? Find Prior Art