Semiconductor devices and methods for manufacturing semiconductor devices

TW202638954APending Publication Date: 2026-09-16KIOXIA CORP
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Patent Information

Application Number
TW114133423
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-03
Filing Date
2025-09-01
Publication Date
2026-09-16

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Abstract

The present invention provides a semiconductor device capable of suppressing deformation of a wafer stack stacked on a substrate and a method for manufacturing the semiconductor device. One embodiment of the semiconductor device includes: a first stack disposed on a substrate, wherein a plurality of first semiconductor wafers are stacked by offsetting them in a direction perpendicular to the stacking direction; and a second stack disposed on the substrate, wherein a plurality of second semiconductor wafers are stacked in the stacking direction; and includes a case where the upper surface of any one of the plurality of second semiconductor wafers is in contact with the lower surface of any one of the plurality of first semiconductor wafers.
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