Liquid immersion device and its control method

Abstract

This invention provides a liquid immersion apparatus and its control method, which can reduce the burden on operators and shorten the control time for experiments, etc. The liquid immersion apparatus according to this embodiment includes: a frame for housing a liquid and a semiconductor device immersed in the liquid; a plurality of control units disposed on the outside of the frame and capable of controlling the semiconductor device; a connecting portion detachably connected to the semiconductor device inside the frame and detachably connected to any one of the plurality of control units outside the frame, and electrically connecting the assembled semiconductor device and the assembled control units.

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