Glass-based substrates including compressive layers, microelectronic articles including same, and methods of making same

Abstract

A glass-based substrate includes a first surface and a second surface opposite the first surface, at least one through glass via extending from the first surface to the second surface of the glass-based substrate, and nanoperforations extending from the first surface to the second surface of the glass-based substrate and defining a contour circumscribing the at least one through glass via. The glass-based substrate includes a compressive layer at the first surface of the glass-based substrate, the second surface of the glass-based substrate, a sidewall of the at least one through glass via, and a sidewall of the nanoperforations.

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