Capture device

Abstract

The trapping device of this embodiment includes a trapping tank, an inner tube within the tank, and an inner container. The trapping tank has a wall forming an internal space for gas flow, connected to an inlet path for introducing gas from the outside into the internal space and an outlet path for discharging fluid from the internal space. The inner tube forms a flow path communicating with the inlet path and extends from the wall into the internal space, having a first open end that opens into the internal space. The inner container is disposed within the internal space and includes: a bottom having a bottom surface spaced apart in a first direction and facing the first open end; and a sidewall erected on the bottom and extending towards the first open end, including a second open end on the first open end side. The second open end is located at the same position as the first open end in the first direction, or at a position further away from the bottom than the first open end. A space exists between the inner surface of the wall and the outer surfaces of the sidewall and the bottom for gas flow. This embodiment provides a trapping device with improved particle capture efficiency.

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