Organic solvent regenerator, substrate processing system, and method of regenerating organic solvent

Abstract

The purpose of this disclosure is to provide a technology that allows a mixture of organic solvent and water from a substrate processing apparatus to easily flow into a recovery tank, thereby reducing the amount of organic solvent waste. The organic solvent regeneration apparatus 5 disclosed herein includes a recovery tank Tk1, an exhaust pipe 551, an exhaust valve 552, a circulation unit 60, a separation pipe 71, and a control unit 9. Organic solvent and water flow into the recovery tank Tk1 through the recovery pipe 51. The exhaust pipe 551, equipped with the exhaust valve 552, is connected to the recovery tank Tk1. During at least a portion of the flow of at least one of the water and organic solvent into the recovery tank Tk1 through the recovery pipe 51, the control unit 9 opens the exhaust valve 552; and during at least a portion of the separation operation, in which the mixture is circulated in the circulation unit 60 to separate the water from the mixture, the exhaust valve 552 is closed.

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