Liquid dispenser apparatus and apparatus for liquid treatment of a wafer-shaped article

TW202639231APending Publication Date: 2026-10-01LAM RES AG
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Patent Information

Application Number
TW114148081
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-11
Filing Date
2025-12-09
Publication Date
2026-10-01

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Abstract

A liquid dispenser apparatus for use in an apparatus for liquid treatment of a wafer-shaped article, the liquid dispenser apparatus being configured to dispense a liquid, the liquid dispenser apparatus comprising: a part configured to contact the liquid; and a voltage supply configured to apply a voltage between the part and a reference point.
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