Optical devices and methods for forming micro-modified regions

Abstract

This invention provides an optical device capable of forming micro-modified regions at a higher speed than before. The optical system of this invention utilizes a pulsed laser beam to form micro-modified regions on a workpiece, comprising: an optical system having a focal-free optical system with a first convex lens system and a second convex lens system arranged along the travel direction of the pulsed laser beam; a rotating mirror disposed at a common focal point of the first and second convex lens systems, and emitting a converging beam from the second convex lens system; and a control unit that controls the reciprocating rotation of the rotating mirror to scan the converging beam on the workpiece along a predetermined beam scanning direction.

Images