Ampoule blocker

TW202639399APending Publication Date: 2026-10-01APPLIED MATERIALS INC
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Patent Information

Application Number
TW114139016
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-07
Filing Date
2025-10-09
Publication Date
2026-10-01

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Abstract

In one or more embodiments, a precursor delivery system includes a container and a blocker inserted into the cavity of the container. The blocker defines a frustum-shaped region, the frustum-shaped region including a first opening positioned at a first end of the frustum-shaped region and a second opening positioned at a second end of the frustum-shaped region. The first end is positioned a distance below the second end. The first opening includes a first area and the second opening includes a second area.
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