Method of regenerating organic solvent, organic solvent regenerator, and substrate processing system

Abstract

This invention provides a technology for achieving more efficient separation operation. The organic solvent regeneration method of this invention includes a recovery step and a separation operation step. In the recovery step, a mixture of organic solvent and water discharged from a substrate processing apparatus that processes substrates is recovered using a recovery tank. In the separation operation step, separation operation is performed, i.e., the mixture is circulated through a circulation path formed by the recovery tank and a circulation piping equipped with a membrane separator, while a pressure reducing pump reduces the pressure in a second path within the membrane separator. This second path is separated from the first path, which is inserted into the circulation piping and allows the mixture to pass through, by a separation membrane. In the separation operation step, the pressure reducing pump is controlled based on a control setpoint set according to a target concentration of the solvent in the mixture.

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