Composite sintered body, electrostatic chuck component, electrostatic chuck device and manufacturing method of composite sintered body

Abstract

This invention relates to a composite sintered body comprising an insulating ceramic as the main phase and a conductive material as the secondary phase, wherein the volume resistivity at 400°C is 1×10¹³ Ω·cm or higher, the difference between the logarithm of the volume resistivity at 400°C and the logarithm of the volume resistivity at 25°C is 1 or higher and 3.5 or lower, and the relative permittivity at 300°C and 100 Hz, and at 300°C and 1 MHz, are both 12.5 or lower.

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