Slurry, grinding method and manufacturing method of parts
TW202639794APending Publication Date: 2026-10-01RESONAC CORP
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Patent Information
- Application Number
- TW115101597
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-01-17
- Filing Date
- 2026-01-15
- Publication Date
- 2026-10-01
Abstract
A slurry comprising abrasive grains and water, the abrasive grains comprising cerium oxide particles, the cerium oxide particles having a water adsorption capacity of 0.032 mmol / m² or more per unit area. A grinding method comprising the step of grinding a workpiece using the slurry. A method for manufacturing a part comprising the step of obtaining a part using a workpiece ground by the grinding method.
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