Membrane deposition apparatus and method for use in membrane deposition apparatus

Abstract

This disclosure provides a method for a membrane material deposition apparatus. The membrane material deposition apparatus includes multiple stations, and the method includes: step S1: providing a substrate to at least two of the multiple stations; step S2: simultaneously depositing membrane material onto each substrate; step S3: transferring each substrate from the current station to another station; step S4: simultaneously depositing membrane material onto each substrate; step S5: repeating steps S3 to S4 until N membrane depositions are completed; the membrane material used in the N membrane depositions is the same.

Images