Spiral mixer for semiconductor processing

Abstract

Mixers for semiconductor processing are provided and include mixing junctions that have a body having a first inlet, an outlet, a first bore extending through the body from the first inlet to the outlet along a center axis, fluidically connecting the first inlet and outlet, having an outer bore surface parallel to the center axis and a spiral surface with a plurality of rotations around the center axis, a second inlet, and a second bore extending from the second inlet to the first bore, terminating at the first bore at a junction point, and fluidically connecting the second inlet to the first bore, in which the spiral surface is radially inwards of the outer bore surface, the rotations of the spiral surface are offset from each other by a pitch parallel to the center axis, and has at least two rotations between the outlet and the junction point.

Images