Substrate holding apparatus, substrate processing apparatus, separation method, and article manufacturing method

TW202639939APending Publication Date: 2026-10-01CANON KK
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Patent Information

Application Number
TW115122777
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-06-03
Filing Date
2024-09-12
Publication Date
2026-10-01

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    Figure TWG2TA001079748_003
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Abstract

A substrate holding apparatus includes a holder configured to hold a substrate, and a gas supplier configured to supply a gas between the substrate and the holder, wherein when separating the substrate from the holder holding the substrate, the gas supplier supplies the gas based on information concerning an adhesive force between the substrate and the holder.
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