Systems and methods for rinsing electroplating rotors
TW202639970APending Publication Date: 2026-10-01APPLIED MATERIALS INC
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Patent Information
- Application Number
- TW114138091
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-03-24
- Filing Date
- 2025-10-02
- Publication Date
- 2026-10-01
Smart Images
Figure TWG2TA001078327_001 
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Abstract
Exemplary methods of cleaning a rotor of an electroplating apparatus may include positioning a rotor of an electroplating apparatus into a rinse position. The methods may include rotating the rotor at a rinse speed. The methods may include spraying a rinse fluid against a surface of the rotor using a rinse nozzle of the electroplating apparatus for a first period of time. The methods may include ceasing the spraying of the rinse fluid. The methods may include rotating the rotor at a dry speed for a second period of time.
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