Pumping device, pumping method, and radiation generator thereof

TW202640024APending Publication Date: 2026-10-01BRIGHTEST TECHNOLOGY TAIWAN CO LTD
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Patent Information

Application Number
TW115109153
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-25
Filing Date
2026-03-12
Publication Date
2026-10-01

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Abstract

A pumping device includes a first chamber; a second chamber located downstream of the first chamber, and a third chamber. The second chamber is connected between the first chamber and the third chamber. A channel structure divides the third chamber into a first compartment and a second compartment. The first compartment is enclosed between the second chamber and the second compartment. The first compartment and the second chamber are connected through an open end and at least one hole of the first compartment. The open end and the at least one hole are oriented at different angles. Pressure within the second chamber is lower than pressure within the first chamber, pressure within the first compartment, and pressure within the second compartment.
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