Powder deposition prevention system

Abstract

The present invention discloses a powder deposition prevention device connected to process pipes to form a waste gas flow path through which waste gas flows together with the process pipes. The device comprises: a transfer gas supply module provided on one side with a first gas supply passage for supplying a transfer gas; a first external pipe coupled to one side of the transfer gas supply module on the outside of the first gas supply passage; a first internal injection pipe, a portion of which is positioned inside the first external pipe, forming a first transfer gas passage on its outside and a waste gas flow path on its inside, and including a first injection nozzle for injecting the transfer gas into the waste gas flow path; and an intermediate guide pipe coupled to the outside and one side of the first internal injection pipe to form the first transfer gas passage on its inside while shielding one side, with the other side being coupled to the first external pipe.

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