Drying equipment

Abstract

The present invention aims to provide a drying apparatus that prevents a substrate from contacting an upper nozzle and a lower nozzle, and dries a coating formed on a specific surface of the substrate. Specifically, the drying apparatus comprises: an upper nozzle that blows hot air onto the upper surface of a substrate; and a lower nozzle that blows hot air onto the lower surface of the substrate. By blowing hot air onto the substrate through the upper and lower nozzles, the substrate is made to float, and the coating formed on a specific surface of the substrate is dried. The drying apparatus also includes a control unit that adjusts the wind speed of the hot air blown from the upper and lower nozzles. The control unit measures the wind speed of the hot air blown from the upper and lower nozzles to adjust the wind speed in a manner that prevents the substrate from contacting the upper and lower nozzles and allows it to float.

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