Overlay metrology target

TW202640102APending Publication Date: 2026-10-01KLA CORP
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Patent Information

Application Number
TW114120005
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-26
Filing Date
2025-05-28
Publication Date
2026-10-01

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    Figure TWG2TA001078168_003
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Abstract

An overlay target may include a first bonded substrate arranged on a first layer. The overlay target may include a second bonded substrate arranged on a second layer. The overlay target may include a third bonded substrate arranged on a third layer, where each bonded substrate includes one or more features embedded in the respective bonded substrate.
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