Flow meter

Abstract

A flow meter includes: a flow path forming member that forms an internal flow path through which a fluid flows; a fluid resistance element that is columnar and made of a ceramic material, and has a resistance flow path fixed within the internal flow path; a pressure sensor that detects a pressure on an upstream side or a downstream side applied to the fluid resistance element; and a sealing member interposed between a wall surface of the internal flow path and the fluid resistance element. The fluid resistance element has a tapered surface formed at an end in an axial direction, and the tapered surface is in contact with, and fixed by, the sealing member.

Images