Sensing apparatus and methods for cylindrical surfaces

TW202640112APending Publication Date: 2026-10-01ULTRA CLEAN HOLDINGS INC
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Patent Information

Application Number
TW115125293
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2021-03-05
Filing Date
2022-03-04
Publication Date
2026-10-01

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Abstract

Provided herein is an apparatus and method for sensing the temperature of a tubing wall, and inferentially the temperature of a fluid within the tubing. The apparatus includes first and second clamp bodies, the first clamp body comprising a heat transfer element and a first and a second electrical connection connected thereto, the second clamp body connectable to the first clamp body to form a clamping cavity therebetween within which a clamped element having a wall is securable, the heat transfer element configured to contact an outer surface of a clamped element therebetween. The heat transfer element may include a thermally conductive compliant element extending through one of the clamp bodies and inwardly of the clamping cavity.
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