actuator

Abstract

The objective of this invention is to detect the load applied to a shaft and a workpiece with higher precision. The actuator of this invention comprises: a shaft 10 having a hollow portion 11 at its front end 10A; a rotating portion 20 that rotates the shaft 10 about an axis; a pressure supply portion 50 through which the shaft 10 is rotatably inserted and which supplies positive or negative pressure to the hollow portion of the shaft 10; a connecting member 36 that transmits the force that moves the shaft 10, the rotating portion 20, and the pressure supply portion 50 along the axis 100 of the shaft 10; a sensor 37 disposed on the connecting member 36 to detect the force applied to the shaft 10; and a first flow path 62, which is part of a gas flow path 60 for gas circulation and is connected to the pressure supply portion 50, moving together with the shaft 10, the rotating portion 20, and the pressure supply portion 50 along the axis 100 of the shaft 10.

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