Sample holder and analytical apparatus
TW202640121APending Publication Date: 2026-10-01KIOXIA CORP
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Patent Information
- Application Number
- TW114130754
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-03-28
- Filing Date
- 2025-08-12
- Publication Date
- 2026-10-01
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Abstract
This embodiment provides a sample holder and analytical apparatus that can suppress the adhesion of substances released from a laser-etched sample to a window through which laser light can pass, thus preventing a decrease in analytical accuracy. The sample holder of this embodiment includes: a sample chamber that can accommodate and hold a stage for the sample, and has a surface including a through hole in a first direction on the surface of the stage in contact with the sample; and a protrusion that protrudes from the through hole of the sample chamber in the first direction, and has a window on its upper surface through which laser light irradiating the sample can pass. It also includes: a first inlet tube disposed at one end of the sample chamber for introducing carrier gas into the sample chamber; and an outlet tube disposed at the other end of the sample chamber for discharging substances released from the sample by laser irradiation from the sample chamber.
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