Transparent surface dirt / defect detection device and method

Abstract

A transparent surface dirt / defect detection device is disclosed. The transparent surface dirt / defect detection device orthogonally shoots a transparent surface layer of a multi-layer structure object under test obtain a first image, and emits sensing light to obliquely illuminate an upper surface of the transparent surface layer. An angle between a propagating direction of the sensing light and the upper surface of the transparent surface layer is the Brewster angle between the transparent surface layer and air, and the sensing light is non-polarized light. After the sensing light obliquely irradiates the upper surface of the transparent surface layer, reflected light and refracted light are formed. The transparent surface dirt / defect detection device filters out the reflected light and receives the refracted light to obtain a second image. Then, the transparent surface dirt / defect detection device identifies and locates an upper surface dirt / defect and a lower surface dirt / defect of the transparent surface layer according to the first image and the second image.

Images