Visual inspection system for electronic components

Abstract

A visual inspection system is provided for high-precision detection of peeling of terminal electrodes (W1) of electronic components. The system includes: an inspection unit (100) which has an illumination means for illuminating the object to be inspected (W), a transport means (1) for transporting the object to be inspected, and an imaging means (2); an inspection control unit (200) which has an image acquisition unit (31) for taking the image signal from the object to be inspected obtained by the imaging means as an inspection image, an image processing unit (32) for processing the inspection image, and a determination unit (34) for determining the inspection image, and a system control unit (35) for controlling the illumination means, the transport means, and the imaging means; and a communication means (4) for connecting the inspection unit and the inspection control unit. The lighting means consists of an upper lighting device (10) and a lower lighting device (20) arranged opposite to each other above and below the transport means. The upper lighting device has an opening (15) for photographing the object being inspected. Both the upper and lower lighting devices have a first light source group arranged orthogonally to the transport direction of the transport means, a second light source group arranged at an angle relative to the transport direction of the transport means, and a third light source group arranged horizontally relative to the transport direction of the transport means. The first and second light source groups are arranged with alternating red and blue light sources, while the third light source group is arranged with only green light sources. In the inspection position (P) on the transport means, the camera optical axis (X) is arranged at an elevation angle (θ) of 5 to 60° relative to the transport direction (A) of the transport means.

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