Imaging sample with scanning probe microscope

Abstract

A method of imaging a sample with a scanning probe microscope, the scanning probe microscope comprising: a platform; a sample on the platform; a probe comprising a probe mount, a cantilever extending from the probe mount, and a probe tip extending from the cantilever; a coarse lateral alignment system; a fine lateral actuation system; a coarse Z-actuator comprising a static part and a moving part; and a fine Z-actuator. The method comprises: in a set-up phase, operating the coarse Z-actuator so that the moving part of the coarse Z-actuator moves from a first position to a second position, relative to the static part, and brings the probe towards the sample on the platform; after the set-up phase, obtaining a sequence of two or more images of the sample, each image being obtained in a respective imaging phase by: generating a lateral scanning motion between the probe and the platform with the fine lateral actuation system so that the probe tip interacts with the sample across a respective imaging region, expanding and contracting the fine Z-actuator so that the probe mount moves towards and away from the platform to react to topographic changes of the sample across the imaging region, and monitoring the probe to obtain an image of the imaging region; and in a transit phase between each pair of imaging phases which are adjacent in the sequence, generating a relative transit motion between the probe and the platform, the relative transit motion following a trajectory in which the probe is retracted from the sample by contraction of the fine Z-actuator, laterally aligned with a new imaging region by the coarse lateral alignment system, and returned to the sample at the new imaging region by expansion of the fine Z-actuator. The moving part of the coarse Z-actuator remains fixed in its second position relative to the static part of the coarse Z-actuator for a full duration of each imaging phase and for a full duration of each transit phase.

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